SEM resolution is tested in terms of a combination of criteria, namely resolved gaps and the number of grey levels in the image. This is to ensure that the resolution has not been distorted by using the contrast to maximise visibility of edges. High resolution images ideally should show fine detail together with a lack of noise, evidenced by a good range of grey levels.
For assessments of resolution in scanning electron microscopes, we have developed a range of gold on carbon and tin on carbon test specimens. These specimens are suitable for tests of SE and BSE imaging and also for chemical mapping in high resolution systems such as in Auger scanning instruments.
The specimens can be supplied on most types of specimen stub.
- Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um...This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.Average lead time: 1 to 13 days
From £113.98
Average lead time: 1 to 13 days 
Critical dimension (CD) calibration test specimens - 500-200-100 nm...This advanced CD calibration test specimen is suitable for calibrating smaller structures.Average lead time: 13 daysFrom £844.32
Average lead time: 13 days
