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Manual Sputter Coater for SEM

Manual Sputter Coater for SEM

An easy-to-use basic sputter coater for gold coating of SEM specimens.

All prices exclude VAT.

Description Features & specs Tech Data

Name & Code

Grouped product items
Code & Description	Availability	Price	Qty
AGB7340 Agar Sputter Coater - Manual Loading...	Loading...	POA	POA
AGB7366 Pumping System for Coater Loading...	Loading...	POA	POA
AGB7348 Manual Film Thickness Monitor Loading...	Loading...	POA	POA

Product Description

This is a easy-to-use basic instrument for gold coating of SEM specimens. It has fully variable current control, a digital process timer with pause option, a variable height specimen table, a hinged top plate and an O-ring sealed vacuum chamber. The control allows the sputter current to be set independently of the gas pressure, which is adjusted separately by a manual leak valve. Coverage and grain size are optimised for any specimen. The cool magnetron type head with 57mm diameter target gives efficient sputtering with minimal heating. Coating time is set by a timer with a digital readout and stored in the memory. The vacuum status and sputter current are displayed on the panel meter.

A modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of only 400 x 600mm. It is fully integrated using a quick release all-metal coupling system. The adjustable height specimen table will accept up to 12 pin type stubs or can be used as a platform for other types of stubs and specimens. A vacuum feed through is provided for the optional film thickness monitor.

Features & Specifications

Sputter head

Low voltage planar magnatron

Sputter target

Gold fitted as standard (Au/Pd or Pt optional)

Sputter supply

Microprocessor based

Sample table

Holds 12 SEM ½" stubs

Analogue metering

Vacuum, Atm - 0.001mb

Dimensions (W x D x H)

420 x 295 x 287mm

Weight

10kg

Power

40VA max (excluding rotary pump)

Pumping system speed

2.5/3.0m3/hr (50/60Hz)

Desktop system

Vacuum pump is mounted on desktop compatible anti-vibration table

Pumping system dimensions (W x D x H)

330 x 215 x 210mm (H 270mm with filter)

Pumping system weight

15kg

Pumping system power

130VA

Services required

Argon gas: purity, min. 99.9%

Technical Data

AGB7340 Manual Sputter Coater for SEM Technical Datasheet AGB7340 Manual Sputter Coater for SEM Technical Datasheet

Chamber size	120mm Ø x 120mm high (4.75" x 4.75")
Sputter head	Low voltage planar magnatron
	Quick target change
	Wrap-around dark-space shield
Sputter target	Gold fitted as standard (Au/Pd or Pt optional)
	57mm Ø x 0.1mm thick
Sputter supply	Microprocessor based
	Safety interlocked
	Current control independent of vacuum
	Variable 10 - 40mA
Sample table	Holds 12 SEM ½" stubs
	Height adjustment through 60mm
Analogue metering	Vacuum, Atm - 0.001mb
	Current, 0 - 50mA
Control method	Manual gas and current control
	Digital timer, 5 - 300 seconds with pause
	Manual vent
Dimensions	W 420mm (16.5"), D 295mm (11.6"), H 287mm (11.3")
Weight	10Kg (22.1 lbs)
Power	40VA max (excluding rotary pump)
Pumping system
Rotary Pump	High speed, direct drive 2-stage
Pumping speed	2.5/3.0m³/hr (50/60Hz)
	Pumpdown time to 0.1mb is 30/25 sec.
Desktop system	Vacuum pump is mounted on desktop compatible anti-vibration table
	All metal vacuum coupling system
Dimensions	W 330mm (13.0"), D 215mm (8.5"),
	H 210mm (8.3"), 270mm (10.6") with filter
Weight	15Kg (33.2 lbs)
Power	130VA
Services required
Supply	100 - 120 or 200 - 240 VAC, 50/60Hz (specify on order)
Power	170VA max.
Argon gas	Purity, min. 99.9%
	Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
	Hose connection, 6.0mm (¼")

Delivery & Returns

PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.