Spare Targets
A range of spare targets is available for most well known makes of sputter coaters. In most instances, foil or disc targets are employed, with some older instruments using solid plated targets.
Disc targets are plain discs. Foil and annular targets are supplied mounted on aluminium backing plates.
The table below shows some of the commonly used target materials.
Coater | Target type | Au | Au/Pd | Pt | Pt/Pd | Pd | Ni | Ag | Cr |
Disc targets | |||||||||
1 | 57mm dia x 0.1mm | AGB7390 | AGB7391 | AGB7392 | AGB7395 | AGB7397 | AGB7393 | AGB7394 | |
1 | 57mm dia x 0.2mm | AGB7390-2 | AGB7391-2 | AGB7392-2 | AGB7395-2 | ||||
2 | 57mm dia x 3.2mm | AGB7396 | |||||||
3 | 54mm dia x 0.1mm | AGB7199 | |||||||
3 | 54mm dia x 0.2mm | AGB7199-2 | AGB7164 | AGB7165 | AGB7166 | AGB7167 | AGB7168 | ||
Foil targets on aluminium backing plates | |||||||||
4 | 58mm (nominal) dia x 0.1mm | AGB7190 | AGB7191 | AGB7192 | AGB7150 | AGB7193 | AGB7194 | ||
5 | 60mm dia x 0.1mm | AGB7184 | AGB7185 | AGB7186 | AGB7169 | AGB7159 | AGB7187 | AGB7188 | |
6 | 40mm dia x 0.1mm | AGB7195 | AGB7196 | ||||||
7 | 20mm dia x 0.1mm | AGB7197 | AGB7198 | ||||||
8 | 40mm dia x 0.1mm Set of 4 | AGB7885 | AGB7888 | AGB7886 | AGB7887 | AGB7889 | |||
Annular targets supplied on aluminium ring holders | |||||||||
9 | OD: 82mm ID: 60mm x 0.1mm | AGB7370 | AGB7371 | AGB7372 | AGB7398 | AGB7373 | AGB7374 | ||
10 | OD: 115mm ID: 92mm x 0.1mm | AGB7876 | AGB7881 | AGB7882 | AGB7883 | AGB7884 | |||
Other targets | |||||||||
Edwards S150A plated | AGB7355A | ||||||||
Edwards S150B 73mm disc Scancoat 6 | AGB7351 | AGB7356 | AGB7357 | ||||||
Other metals are available in certain sizes, please ask for details. | |||||||||
Coater type | |||||||||
1 | Agar coaters | ||||||||
2 | Agar turbo coater Cressington turbo coater | ||||||||
3 | Bal-Tec/Leica SCD005, SCD050, MED010,MED020 | ||||||||
4 | Polaron/Quorum/Bio-Rad/VG/Emitech - SC500,SC500A | ||||||||
5 | Polaron/Quorum/Bio-Rad/VG/Emitech - K500X, K550X | ||||||||
6 | Polaron/Quorum/Bio-Rad/VG/Emscope - SM300, SC400 | ||||||||
7 | Polaron/Quorum/Bio-Rad/VG/Emscope - K1250X, SP2000 | ||||||||
8 | Polaron/Quorum/Bio-Rad/VG/Emitech - SC650, SC650A | ||||||||
9 | Polaron/Quorum/Bio-Rad/VG/Emitech - SC510, SC515, E5100, SC7640, SC7680 | ||||||||
10 | Polaron/Quorum/Bio-Rad/VG/Emitech - E5175 |