292nm Reference Standard
292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB.
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The 292nm pitch is accurate to ±1%. The surface structure is titanium lines on silicon. The line height is approximately 30nm with a line width of 130nm (not calibrated).
For SEM it can be used for a wide range of accelerating voltages. For AFM it can be used in contact, tapping, and other modes, with image sizes from 500nm to 20µm.
It can be supplied either non-certified or with a non-traceable manufacturer’s certificate stating average pitch based on batch measurements.
A traceable, certified version measured in comparison with a standard calibrated at the German PTB (Physikalisch-Technische Bundesanstalt) can also be supplied - please enquire.
* When requesting a quote for AGS1867D or AGS1868D, please specify the stub you would like from our catalogue, or provide information on the stub you would like to send to us for mounting.