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Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure

Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure

This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.

All prices exclude VAT.

Description

Name & Code

Grouped product items
Code & Description	Availability	Price	Qty
AGS1995A CD Calibration Specimen 0.5-10um Non Certified Loading...	Loading...	POA	POA
AGS1997A CD Calibration Specimen 0.5-10um GPTB Certified Loading...	Loading...	POA	POA

Product Description

This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch: 10, 5, 2, 1 and 0.5 µm. The central line area can be used for AFM measurements. The patterns are etched into silicon with a depth of approximately 200 µm. There is no coating on the silicon surface.

Each standard is identified by a unique serial number.

The specimen can be supplied unmounted or mounted on any of the standard range of SEM stubs. Please specify.

Delivery & Returns

PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.