A range of very high resolution reference calibration standards for AFM, SEM, Auger & FIB.
- Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um...This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.Average lead time: 1 to 8 days
POA
Average lead time: 1 to 8 days 
Critical dimension (CD) calibration test specimens - 500-200-100 nm...This advanced CD calibration test specimen is suitable for calibrating smaller structures.Average lead time: 8 daysPOA
Average lead time: 8 days
292nm Reference Standard292nm pitch reference standard for very high resolution calibration of AFM, SEM, Auger and FIB.Average lead time: 8 to 39 daysPOA
Average lead time: 8 to 39 days
SEM 144nm Reference StandardThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Average lead time: 8 to 39 daysPOA
Average lead time: 8 to 39 days
SEM 144nm Reference Standard, CertifiedThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Average lead time: 8 to 39 daysPOA
Average lead time: 8 to 39 days
SEM 300nm Reference StandardThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Average lead time: 8 to 39 daysPOA
Average lead time: 8 to 39 days
