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Calibration gratings - TGXYZ series

Calibration gratings - TGXYZ series

Calibration gratings arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer.

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Description Tech Data

Name & Code

Grouped product items
Code & Description	Availability	Price	Qty
AGF7021 Grating TGXYZ01 Step Height 20nm Loading...	Loading...	POA	POA
AGF7022 Grating TGXYZ02 Step Height 100nm Loading...	Loading...	POA	POA
AGF7023 Grating TGXYZ03 Step Height 500nm Loading...	Loading...	POA	POA

Product Description

Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500μm by 500μm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5μm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10μm.

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.

The TGXYZ series of Calibration Gratings are supplied mounted on a round 12mm dia metal plate. They are also available unmounted if required.

Active area: 1 x 1mm

Chip dimensions: 5 x 5 x 0.3mm

Technical Data

Cat. no.	Part number	Step height*	Height accuracy	Pitch	Pitch accuracy
AGF7021	TGXYZ01	20nm	2%	5 and 10μm	0.1μm
AGF7022	TGXYZ02	100nm	3%	5 and 10μm	0.1μm
AGF7023	TGXYZ03	500nm	3%	5 and 10μm	0.1μm
The dimensions marked * are given for reference only. The actual step height, shown on the label of the individual grating box may differ slightly from the nominal value.

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PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.