Economically priced yet fully-featured Bi-Directional Critical Dimension Standard with X and Y axis for calibration over a wide measurement range. 2.0mm to 100nm for a magnification range up to 10 - 200,000x.
Economically priced yet fully-featured Bi-Directional Critical Dimension Standard with X and Y axis for calibration over a wide measurement range.
Available with two size ranges, which are both offered as traceable and certified standards:
Each die has a unique serial identification number and is NIST traceable:
Manufactured on an ultra-flat silicon substrate with a precise 60nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm.
The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction, the CDMS standard can be cleaned using gentle plasma cleaning.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±20µm. There is no coating on the Si surface. Each CDMS calibration standard has a unique identification number.
