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Automatic Sputter Coater

Automatic Sputter Coater

A more advanced sputter coater where the complete sequence of flush, leak, coat and vent is automatically controlled.

All prices exclude VAT.

Description Features & specs Tech Data

Name & Code

Grouped product items
Code & Description	Availability	Price	Qty
AGB7341 Agar Sputter Coater - Automatic Loading...	Loading...	POA	POA
AGB7341SE Agar Sputter Coater with larger chamber - Automatic Loading...	Loading...	POA	POA
AGB7366 Pumping System for Coater Loading...	Loading...	POA	POA
AGB7348 Manual Film Thickness Monitor Loading...	Loading...	POA	POA
AGB7349 Terminating Film Thickness Monitor Loading...	Loading...	POA	POA

Product Description

A more advanced sputter coater where the complete sequence of flush, leak, coat and vent is automatically controlled. The solenoid operated leak valve allows the gas pressure to return automatically to pre-set conditions. The coater can also be operated in the manual mode if required. The sputter current is set by a digital programmer and is independent of the gas pressure. Sputtering currents up to 40mA allow a range of target materials to be efficiently sputtered by the magnetron head. Coating time can be set, stored and displayed by the digital timer.

Further automation can be achieved with the addition of the terminating film thickness monitor. With this fitted, the desired thickness can be entered and the sputtering process is automatically terminated when this thickness has been reached.

Chamber size AGB7341: 120 x 120mm.

Chamber size AGB7341SE:150 x 165mm.

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Features & Specifications

Sputter head

Low voltage planar magnetron type with quick target change, wrap-around dark-space shield

Sputter target

Gold target ø57 x 0.1mm fitted as standard. Optional targets: Au/Pd, Pt, Pt/Pd, Ag 57mm dia. x 0.1mm thick, or 57mm dia. x 0.2mm thick

Sputter supply

Programmable digital control, microprocessor-based, safety interlocked, current control independent of vacuum, 10 - 40mA

Sample table

Holds 12 SEM ½” (12.5 mm) stubs delivered as standard, height adjustment through 60mm. R-T stage available for AGB7341, R-T and R-P-T stage available for AGB7341SE

Analogue metering

Vacuum: atmosphere - 0.001mb, Current: 0 - 50mA

Dimensions (W x D x H)

420mm x 295mm x 287 mm

Weight

11kg

Power

45 VA max. (excluding rotary pump)

Pumping system speed

3.0/3.6m³/hr (50/60Hz). Pump downtime to 0.1mb is 20/25 sec

Benchtop system

Vacuum pump is mounted on benchtop compatible anti-vibration table with stainless steel bellows coupling system

Pumping system dimensions (W x D x H)

330mm x 215mm x 210mm (270mm with filter) x 210 mm

Pumping system weight

15kg

Pumping system power

130 VA

Technical Data

AGB7341 & AGB7341SE Agar Automatic Sputter Coater Technical Datasheet AGB7341 & AGB7341SE Agar Automatic Sputter Coater Technical Datasheet

Specification
Chamber size	AGB7341 120mm (4.75") dia x 120mm (4.75") high
	AGB7341SE 150mm (5.9”) dia x 165mm (6.5") to 250mm (9.8")
Sputter target	Gold target ø 57 x 0.1mm fitted as standard.
	Optional targets: Au/Pd, Pt, Pt/Pd, Ag 57mm dia. x 0.1mm thick, or 57mm dia. x 0.2mm thick
Sample table	Holds 12 SEM ½” (12.5 mm) stubs delivered as standard, height adjustment through 60mm. R-T stage available for AGB7341, R-T and R-P-T stage available for AGB7341SE
Sputter supply	Programmable digital control, microprocessor-based
	Safety interlocked
	Current control independent of vacuum, 10 - 40mA
Sputter head	Low voltage planar magnetron type with quick target change
	Wrap-around dark-space shield
Analogue metering	Vacuum: atmosphere - 0.001mb
	Current: 0 - 50mA
Control method	Automatic operation of gas purge and leak functions
	Automatic process sequencing
	Full manual override
	Digital timer (0-300 sec) with pause
	Automatic vent
Dimensions	420mm Wide x 295mm Deep x 287mm Height
Weight	11kg
Power consumption	45 VA max. (excluding rotary pump)
Pumping System
Rotary pump	High speed, direct drive, 2 stage
Pumping speed	3.0/3.6m³/hr (50/60Hz)
	Pump downtime to 0.1Mb is 20/25 sec
Benchtop system	The vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system
Dimensions	330mm Wide x 215mm Deep x 210mm (270mm with filter) x Height 210mm
Weight	15kg
Power consumption	130 VA
Services required
Supply	100 – 120 or 200 – 240 VAC, 50/60Hz (specify on order)
Power	175VA max.
Argon Gas	Purity min. 99.9%
	Pressure: regulated 7 – 8 psi (0.5 – 0.6 bar)
	Hose connection: 6.0mm (1/4”)
Thickness Monitors (optional)
General specification	4 digit display, push-button zero
	6MHz crystal with lifetime check
	10/sec update rate
Thickness range	MINUS 99.9nm to 999.9nm
Resolution	Better than 0.1nm
Density range	0.50-30.00gm/cm³
Tooling factor range:	0.25-8.0
Crystal check	Lifetime display, 0.0 to 999.9kHz shift
Parameter setting	Non-volatile parameter memory with automatic acceleration of scrolling rate
Data change facility	2 source memory (e.g. Au sputter and C evaporation)
Supply	100 - 120 or 200 - 240 VAC @ 4 VA, 50/60Hz
Dimensions	Width 208mm (8.2"), Height 76mm (3.0"), Depth 160mm (6.3")
Weight	1.7kg (3.75 lbs)
Terminate facility (only AGB7349)	Push button enable/disable
Termination range (only AGB7349)	0 - 999.9nm
Termination output	SPCO relay contact, voltage free rated 0.5A @110 VAC, 1A @ 24VDC

Delivery & Returns

PRICE & AVAILABILITY: Please note that while we are working closely with our suppliers to minimise any global supply chain issues, prices and availability may be subject to change at short notice.