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Calibration Standards
Grating type TGX

Grating type TGX

The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm

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Description Tech Data

Grouped product items
Code & Description	Availability	Price	Qty
AGF7026 Grating Type TGX01 3 Micron Pitch Loading...	Loading...	£230.07	£230.07

Product Description

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

Application

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
determination of the tip aspect ratio

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Technical Data

Cat. no.	Grating type	Step height µm*	Pitch µm	Accuracy µm	Edge radii mm	Active area mm	Chip dims. mm
AGF7026	TGX01	1	3.0	0.1	<5	1 x 1	5 x 5 x 0.3

*The step height value is given for information only, not for vertical calibration purposes

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