Critical dimension (CD) calibration test specimens - 10-5-2-1-0.5um structure
This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.
All prices exclude VAT.ORDER ONLINE - no minimum order value
AGENTS & DISTRIBUTORS - available worldwide
REQUEST QUOTES - fast online pricing
Product DescriptionDelivery & Returns
This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch: 10, 5, 2, 1 and 0.5 µm. The central line area can be used for AFM measurements. The patterns are etched into silicon with a depth of approximately 200 µm. There is no coating on the silicon surface.
Each standard is identified by a unique serial number.
The specimen can be supplied unmounted or mounted on any of the standard range of SEM stubs. Please specify.
More Special Offers
Calibration StandardsDiamond KnivesProbes - HQ SeriesProbes - OPUS SeriesProbes - General Imaging (SCOUT Range)Probes - Conductive (SPARK Range)Specimen PreparationSpecimen StorageSubstratesTweezers & ToolsManufactured by Agar ScientificInstrumentationTweezers & ToolsSEMTEMLMAFM & SPMFIBGeneral ConsumablesCryo-EM