Calibration gratings
The calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate.
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Product DescriptionDelivery & Returns
The calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form an angle of 54°74’.
Key Features
- Active area - 3 x 3mm
- Chip dimensions - 5 x 5 x 0.3mm
- Pitch - 10um
- Pitch accuracy - 0.1um
- Step height - 1.75um
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